Tools Operating Procedures and Recipes
LITHOGRAPHY
Tool | Procedure | Short Procedure | Recipes | Notes |
E-beam Writer | EBPG 5200 | N/A | Litho | |
HMDS Oven | HMDS Oven | N/A | N/A | |
Laser Writer | Laser Writer | N/A | Litho | |
Mask Aligner | Mask Aligner | N/A | Litho | |
Spinners | Spinners | N/A | N/A | |
Vac Oven, Low | Vac Oven, Low | N/A | N/A | |
Vac Oven, High | Vac Oven, High | N/A | N/A |
DEPOSITION
Tool | Procedure | Short Procedure | Recipes | Notes |
ALD | ALD | ALD | ALD | |
Dual e-beam | Dual e-beam | N/A | N/A | |
E-beam/thermal | E-beam/thermal | N/A | N/A | |
PECVD | PECVD | PECVD | PECVD | |
PLD | PLD | N/A | N/A | |
Sputterer | Sputterer | N/A | N/A |
DRY ETCH
Tool | Procedure | Short Procedure | Recipes | Notes |
Asher | Asher | Asher | Asher | |
Cl-ICP | Cl-ICP | Cl-ICP | Cl-ICP | |
F-ICP | F-ICP | F-ICP | F-ICP | |
Harrick Plasma | Harrick Plasma | N/A | N/A | |
Ion Mill | Ion Mill | Ion Mill | Ion Mill | |
Ion Mill 2 | Ion Mill 2 | N/A | Ion Mill 2 |
THERMAL PROCESSING
Tool | Procedure | Short Procedure | Recipes | Notes |
Furnace | Furnace | Furnace | N/A | |
RTA | RTA | RTA | N/A |
METROLOGY
Tool | Procedure | Short Procedure | Recipes | Notes |
Ellipsometer | Ellipsometer | N/A | N/A | |
Four Point Probe | Four-Point-Probe | N/A | N/A | Four Point Probe |
Microscopes | Microscopes | N/A | N/A | |
Profilometer | Profilometer | N/A | N/A | |
SEM | SEM | N/A | N/A |
PACKAGING
Tool | Procedure | Short Procedure | Recipes | Notes |
Dicing Saw | Dicing Saw | N/A | N/A |
MISCELLANEOUS
Tool | Procedure | Short Procedure | Recipes | Notes |
Critical Point Drier | Critical Point Drier | N/A | N/A | |
Ozone Cleaner | Ozone Cleaner | N/A | N/A |