Chemicals Approved for Use in UDNF

 

Last Updated: 08/18/2022

Safety Data Sheets (SDS) are available below for all chemicals approved for use in the cleaanroom and are also available in hard copy in the yellow SDS binders located in the cleanroom. Technical Data Sheets (TDS) can be obtained from the suppliers.

General Guidelines

  • Read each chemical’s SDS before using it.
  • Always wear the required personal protective equipment (PPE) when working with chemicals.
  • Please treat all chemicals with respect.
  • Handle chemicals with care.
  • Solutions containing Hydrofluoric Acid or Hydrogen Peroxide (e.g. Purestrip) are extremely dangerous.

Requesting Approval for New Chemicals

  • If the chemical you wish to use is not already approved please contact the Director.
  • Please provide an electronic SDS with your request.
  • Please place the request in advance of the intended use date: allow 2-3 weeks for request processing.
  • Requests for chemicals with proprietary compositions or chemicals that are subject to export restrictions will take longer to process.
  • Please feel free to inquire about the status of your request.
  • Some chemicals may be deemed too hazardous and may not be approved.
  • Please do NOT order the chemical without written permission from the Director.

 

RESISTS, POSITIVE

Chemical UDNF
Supplied
SDS TDS
Notes
495 PMMA Yes* 495 PMMA SDS *A4
950 PMMA Yes* 950 PMMA SDS *A2, A4
AR-P 5300 No AR-P 5300
AR-P 6200 Yes* AR-P 6200 *.04, .09
AZ 1500 Series Yes* AZ 1512 *1512
AZ 5214E No AZ 5214E
AZ MiR 701 No AZ MiR 701
AZ P4000 Series No AZ P4330-RS
LOR A Yes*
LOR A Series *3A, 5A
LOR B No
LOR B Series
Megaposit SPR 220 Series No Megaposit SPR 220-3.0
Microposit S1800 Series No Microposit S1813
MMA(8.5)MAA
No
MMA(8.5)MAA EL Series
PMGI SFG Slow Series No PMGI SFG Slow Series
ZEP 520A No ZEP 520A

 

RESISTS, NEGATIVE

Chemical UDNF
Supplied
SDS TDS
Notes
AR-N 7520 Yes*
AR-N 7520 *.073, .18
AZ nLOF 2020 Yes
AZ nLOF 2020
AZ nLOF 2070 No AZ nLOF 2070
AZ nLOF 5510 No AZ nLOF 5510
FOx-1x No FOx-1x
HSQ
No XR 1541  
SU-8 2000 No SU-8 2000 Series
SU-8 3000 No SU-8 3000 Series
SU-8 TF 6000 No SU-8 TF 6000

 

OTHER FILMS

Chemical UDNF
Supplied
SDS TDS Notes
Cyclotene No Cyclotene
PEDOT:PSS No PEDOT:PSS
Polyimide HD 4100 No Polyimide HD 4100
Specialty Polymer PGMEA Solution No Specialty Polymer PGMEA Solution
Sylgard 184 Base No Sylgard 184 Base
Sylgard 184 Curing Agent No Sylgard 184 Curing Agent

 

 

ADHESION PROMOTERS

Chemical UDNF
Supplied
SDS TDS
Notes
AP3000 No AP3000
AR 300-80 Yes AR 300-80
HMDS Yes HMDS
MCC Primer 80/20 No MCC Primer 80/20
Surpass 3000 Yes SurPass 3000
Surpass 4000 Yes SurPass 4000

 

 

DEVELOPERS, ALKALINE

Chemical UDNF
Supplied
SDS TDS
Notes
AR 300-26 No AR 300-26
AR 300-40 Yes* AR 300-40 *300-47
AZ 300 MIF Yes AZ 300 MIF
AZ 340 No AZ 340
AZ 400K No AZ 400K
MF-312 No MF-312

 

 

DEVELOPERS, SOLVENT-BASED

Chemical UDNF
Supplied
SDS TDS
Notes
AR 600-546 Yes AR 600-546
PA 400 R No PA 400 R
PA 401 D No PA 401 D
SU-8 Developer
Yes SU-8 Developer

 

 

REMOVERS

Chemical UDNF
Supplied
SDS TDS
Notes
ACT CMIK-S No ACT CMIK-S Post etch remover
AR 300-76 Yes AR 300-76
Purestrip Yes Purestrip Stabilized version of Piranha

 

ETCHANTS

Chemical UDNF
Supplied
SDS TDS
Notes
BOE 6:1 Yes BOE
Chromium Etchant Yes* Chromium Etchant *1020AC
Copper Etchant No CE-100

 

ACIDS

Chemical UDNF
Supplied
SDS TDS
Notes
Acetic Acid No Acetic Acid
Citric Acid No Citric Acid
Hydrochloric Acid Yes Hydrochloric Acid
Hydrofluoric Acid Yes Hydrofluoric Acid
Nitric Acid Yes Nitric Acid
Phosphoric Acid Yes Phosphoric Acid
Sulfuric Acid Yes Sulfuric Acid

 

 

BASES

Chemical UDNF
Supplied
SDS TDS
Notes
Ammonium Hydroxide Yes Ammonium Hydroxide
Potassium Hydroxide Yes Potassium Hydroxide

 

OXIDIZERS

Chemical UDNF
Supplied
SDS TDS
Notes
Hydrogen Peroxide Yes Hydrogen Peroxide

 

SOLVENTS

Chemical UDNF
Supplied
SDS TDS Notes
Acetone Yes Acetone
Anisole No Anisole
Cyclopentanone No Cyclopentanone
Dimethyl Sulfoxide No Dimethyl Sulfoxide
Ethanol No Ethanol
Ethyl Acetate No Ethyl Acetate
Isopropanol Yes Isopropanol
Methanol No Methanol
NMP
Yes NMP
o-Xylene No o-Xylene
PGMEA No PGMEA
Toluene No Toluene

 

 

MISCELLANEOUS

Chemical UDNF
Supplied
SDS TDS
Notes
APTES
No APTES
AR-PC 5090
No AR-PC 5090 charge conduction
AZ EBR Solvent
No AZ EBR Solvent
Benzoquinone
No Benzoquinone
Discharge H2O No Discharge H2O
Ethylene Glycol
No Ethylene Glycol
Ferric Chloride Hexahydrate No Ferric Chloride Hexahydrate
Futurrex EBR2 No Futurrex EBR2
Sodium Hypuchlorite No Sodium Hypochlorite
Triton X-100 No Triton X-100

 

ALD PRECURSORS

Chemical UDNF
Supplied
SDS TDS
Notes
Bis(methylcyclopentadienyl)zirconium(IV) dichloride Yes Bis(methylcyclopentadienyl)zirconium(IV) dichloride
Tetrakis(dimethylamido)hafnium(IV) Yes Tetrakis(dimethylamido)hafnium(IV)
Tetrakis(dimethylamino)titanium(IV) Yes Tetrakis(dimethylamino)titanium(IV)
Trimethyl Aluminum Yes Trimethyl Aluminum
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