Chemicals Approved for Use in UDNF
Last Updated: 08/08/2024
Safety Data Sheets (SDS) are available below for all chemicals approved for use in the cleaanroom and are also available in hard copy in the yellow SDS binders located in the cleanroom. Technical Data Sheets (TDS) can be obtained from the suppliers.
General Guidelines
- Read each chemical’s SDS before using it.
- Always wear the required personal protective equipment (PPE) when working with chemicals.
- Please treat all chemicals with respect.
- Handle chemicals with care.
- Solutions containing Hydrofluoric Acid or Hydrogen Peroxide (e.g. Purestrip) are extremely dangerous.
Requesting Approval for New Chemicals
- If the chemical you wish to use is not already approved please contact the Director.
- Please provide an electronic SDS with your request.
- Please place the request in advance of the intended use date: allow 2-3 weeks for request processing.
- Requests for chemicals with proprietary compositions or chemicals that are subject to export restrictions will take longer to process.
- Please feel free to inquire about the status of your request.
- Some chemicals may be deemed too hazardous and may not be approved.
- Please do NOT order the chemical without written permission from the Director.
RESISTS, POSITIVE
| Chemical | UDNF Supplied |
SDS | TDS |
Notes |
| 495 PMMA Series | Yes* | 495 PMMA | *A4 | |
| 950 PMMA Series | Yes* | 950 PMMA | *A2 | |
| AR-P 5300 Series | No | AR-P 5300 | ||
| AR-P 6200 Series | Yes* | AR-P 6200 | *.04, .09 | |
| AZ 1500 Series | Yes* | AZ 1512 | *1512 | |
| AZ 5214E | No | AZ 5214E | ||
| AZ MiR 701 | No | AZ MiR 701 | ||
| AZ P4000 Series | No | AZ P4330-RS | ||
| LOR A Series | Yes* |
LOR A Series | *3A, 5A | |
| LOR B Series | No |
LOR B Series | ||
| MMA(8.5)MAA |
No |
MMA(8.5)MAA EL Series | ||
| PMGI SFG Slow Series | No | PMGI SFG Slow Series | ||
| PR1 Series | No | PR1-2000A | ||
| S1800 Series | No | Microposit S1813 | ||
| SPR 220 Series | No | Megaposit SPR 220-3.0 | ||
| ZEP 520A | No | ZEP 520A |
RESISTS, NEGATIVE
| Chemical | UDNF Supplied |
SDS | TDS |
Notes |
| AR-N 7520 Series | Yes* |
AR-N 7520 | *.073, .18 |
|
| AZ nLOF 2020 | Yes |
AZ nLOF 2020 | ||
| AZ nLOF 2070 | No | AZ nLOF 2070 | ||
| AZ nLOF 5510 | No | AZ nLOF 5510 | ||
| FOx-1x | No | FOx-1x | ||
| HSQ | No | XR 1541 | ||
| NR9 Series | No | NR9-3000P | ||
| NR26 Series | No | NR26-25000P3 | ||
| SU-8 2000 Series | No | SU-8 2000 Series | ||
| SU-8 3000 Series | No | SU-8 3000 Series | ||
| SU-8 TF 6000 Series | No | SU-8 TF 6000 | ||
| SX AR-N 8250 Series | No | SX AR-N 8250 Series |
OTHER FILMS
| Chemical | UDNF Supplied |
SDS | TDS | Notes |
| Cyclotene | No | Cyclotene | ||
| PEDOT:PSS | No | PEDOT:PSS | ||
| Polyimide HD 4100 | No | Polyimide HD 4100 | ||
| Specialty Polymer PGMEA Solution | No | Specialty Polymer PGMEA Solution | ||
| Sylgard 184 Base | No | Sylgard 184 Base | ||
| Sylgard 184 Curing Agent | No | Sylgard 184 Curing Agent |
ADHESION PROMOTERS
| Chemical | UDNF Supplied |
SDS | TDS |
Notes |
| AP3000 | No | AP3000 | ||
| AR 300-80 | Yes | AR 300-80 | ||
| HMDS | Yes | HMDS | ||
| MCC Primer 80/20 | No | MCC Primer 80/20 | ||
| Surpass 3000 | Yes | SurPass 3000 | ||
| Surpass 4000 | Yes | SurPass 4000 |
DEVELOPERS, ALKALINE
| Chemical | UDNF Supplied |
SDS | TDS |
Notes |
| AR 300-26 | No | AR 300-26 | ||
| AR 300-40 | Yes* | AR 300-40 | *300-47 | |
| AZ 300 MIF | Yes | AZ 300 MIF | ||
| AZ 340 | No | AZ 340 | ||
| AZ 400K | Yes | AZ 400K | ||
| MF-312 | No | MF-312 | ||
| RD6 | No | RD6 |
DEVELOPERS, SOLVENT-BASED
| Chemical | UDNF Supplied |
SDS | TDS |
Notes |
| AR 600-546 | Yes | AR 600-546 | ||
| PA 400 R | No | PA 400 R | ||
| PA 401 D | No | PA 401 D | ||
| SU-8 Developer |
Yes | SU-8 Developer |
REMOVERS
| Chemical | UDNF Supplied |
SDS | TDS |
Notes |
| ACT CMIK-S | No | ACT CMIK-S | Post etch remover | |
| AR 300-76 | Yes | AR 300-76 | ||
| Purestrip | Yes | Purestrip | Stabilized version of Piranha | |
| P1331-05 | No | P1331-05 | ||
| Remover PG | No | Remover PG |
ETCHANTS
| Chemical | UDNF Supplied |
SDS | TDS |
Notes |
| BOE 6:1 | Yes | BOE | ||
| Chromium Etchant | Yes* | Chromium Etchant | *1020AC | |
| Copper Etchant | No | CE-100 | ||
| Gold Etchant TFA | No | Gold Etchant TFA |
ACIDS
| Chemical | UDNF Supplied |
SDS | TDS |
Notes |
| Acetic Acid | No | Acetic Acid | ||
| Citric Acid | No | Citric Acid | ||
| Hydrochloric Acid | Yes | Hydrochloric Acid | ||
| Hydrofluoric Acid | Yes | Hydrofluoric Acid | ||
| Nitric Acid | Yes | Nitric Acid | ||
| Phosphoric Acid | Yes | Phosphoric Acid | ||
| Sulfuric Acid | Yes | Sulfuric Acid |
BASES
| Chemical | UDNF Supplied |
SDS | TDS |
Notes |
| Ammonium Hydroxide | Yes | Ammonium Hydroxide | ||
| Potassium Hydroxide | Yes | Potassium Hydroxide |
OXIDIZERS
| Chemical | UDNF Supplied |
SDS | TDS |
Notes |
| Hydrogen Peroxide | Yes | Hydrogen Peroxide |
SOLVENTS
| Chemical | UDNF Supplied |
SDS | TDS | Notes |
| Acetone | Yes | Acetone | ||
| Anisole | No | Anisole | ||
| Cyclopentanone | No | Cyclopentanone | ||
| Dimethyl Sulfoxide | No | Dimethyl Sulfoxide | ||
| Ethanol | No | Ethanol | ||
| Ethyl Acetate | No | Ethyl Acetate | ||
| Isopropanol | Yes | Isopropanol | ||
| Methanol | No | Methanol | ||
| NMP |
Yes | NMP | ||
| o-Xylene | Yes | o-Xylene | ||
| PGMEA | No | PGMEA | ||
| Toluene | No | Toluene |
MISCELLANEOUS
| Chemical | UDNF Supplied |
SDS | TDS |
Notes |
| Ammonium Sulfide | No | Ammonium Sulfide | ||
| APTES |
No | APTES | ||
| AR-PC 5090 |
No | AR-PC 5090 | charge conduction | |
| AZ EBR Solvent |
No | AZ EBR Solvent | ||
| Benzoquinone |
No | Benzoquinone | ||
| Discharge H2O | No | Discharge H2O | ||
| Ethylene Glycol |
No | Ethylene Glycol | ||
| Ferric Chloride Hexahydrate | No | Ferric Chloride Hexahydrate | ||
| Futurrex EBR2 | No | Futurrex EBR2 | ||
| Triton X-100 | No | Triton X-100 |
ALD PRECURSORS
| Chemical | UDNF Supplied |
SDS | TDS |
Notes |
| Bis(methylcyclopentadienyl)zirconium(IV) dichloride | Yes | Bis(methylcyclopentadienyl)zirconium(IV) dichloride | ||
| Tetrakis(dimethylamido)hafnium(IV) | Yes | Tetrakis(dimethylamido)hafnium(IV) | ||
| Tetrakis(dimethylamino)titanium(IV) | Yes | Tetrakis(dimethylamino)titanium(IV) | ||
| Trimethyl Aluminum | Yes | Trimethyl Aluminum |
