Tools Operating Procedures and Recipes

 

 

LITHOGRAPHY

Tool Procedure Short Procedure Recipes Notes
E-beam Writer  EBPG 5200  N/A  Litho  
HMDS Oven  HMDS Oven  N/A  N/A  
Laser Writer  Laser Writer  N/A  Litho  
Mask Aligner  Mask Aligner  N/A  Litho  
Spinners  Spinners  N/A  N/A  
Vac Oven, Low  Vac Oven, Low  N/A  N/A  
Vac Oven, High  Vac Oven, High  N/A  N/A  

 

DEPOSITION

Tool Procedure Short Procedure Recipes Notes
ALD  ALD  ALD  ALD  
Dual e-beam  Dual e-beam  N/A  N/A  
E-beam/thermal  E-beam/thermal  N/A  N/A  
PECVD  PECVD  PECVD  PECVD  
PLD  PLD  N/A  N/A  
Sputterer  Sputterer  N/A  N/A  

 

DRY ETCH

Tool Procedure Short Procedure Recipes Notes
Asher  Asher  Asher  Asher  
Cl-ICP  Cl-ICP  Cl-ICP  Cl-ICP  
F-ICP  F-ICP  F-ICP  F-ICP  
Harrick Plasma  Harrick Plasma  N/A  N/A  
Ion Mill  Ion Mill  Ion Mill  Ion Mill  

 

THERMAL PROCESSING

Tool Procedure Short Procedure Recipes Notes
Furnace  Furnace  Furnace  N/A  
RTA  RTA  RTA  N/A  

 

METROLOGY

Tool Procedure Short Procedure Recipes Notes
Ellipsometer  Ellipsometer  N/A  N/A  
Four Point Probe  Four-Point-Probe  N/A  N/A  Four Point Probe
Microscopes  Microscopes  N/A  N/A  
Profilometer  Profilometer  N/A  N/A  
SEM  SEM  N/A  N/A  

 

PACKAGING

Tool Procedure Short Procedure Recipes Notes
Dicing Saw  Dicing Saw  N/A  N/A  

 

MISCELLANEOUS

Tool Procedure Short Procedure Recipes Notes
Critical Point Drier  Critical Point Drier  N/A  N/A  
Ozone Cleaner  Ozone Cleaner  N/A  N/A  
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