(302) 831-4863 werrell@udel.edu

Alain Diebold is the Empire Innovation Professor of Nanoscale Science in the Colleges of Nanoscale Science and Engineering at the State University of New York’s Polytechnic Institute.  He is also the Executive Director of the Center for Nanoscale Metrology.  His primary research areas include nanoscale metrology and materials science, materials characterization at the nanoscale using electron microscopy (transmission electron microscopy (TEM) and scanning TEM), and semiconductor metrology and characterization. One part of this research involves extending these concepts to new materials and structures.

Dr. Diebold earned his BS in chemistry from Indiana University-Purdue University, and holds the PhD in Statistical Mechanics of Gas-Solid Surface Scattering earned at Purdue University.  He is Associate Editor of the IEEE Transactions on Semiconductor Manufacturing as well as the Metrology Section of Future FAB International.  A frequent presenter at international conferences, Dr. Diebold has been named a Fellow of both the International Society for Optics and Photonics (SPIE) and the American Vacuum Society (AVS).